3/31/2010	12:08:22 AM	Helium valve closed
3/31/2010	12:08:22 AM	H2 valve closed
3/31/2010	12:08:22 AM	BCl3 valve closed
3/31/2010	12:08:22 AM	PH3 valve closed
3/31/2010	12:08:22 AM	SiCl4 pre valve closed
3/31/2010	12:08:22 AM	SiCl4 post valve closed
3/31/2010	12:08:22 AM	Main Vac valve closed
3/31/2010	12:08:22 AM	Bypass valve closed
3/31/2010	12:08:22 AM	Bubbler valve closed
3/31/2010	12:08:22 AM	Helium MFC set to  0.000000
3/31/2010	12:08:22 AM	H2 MFC set to  0.000000
3/31/2010	12:08:22 AM	BCl3 MFC set to  0.000000
3/31/2010	12:08:22 AM	SiCl4 MFC set to  0.000000
3/31/2010	12:08:22 AM	Bypass solenoid MFC set to  0.000000
3/31/2010	12:08:22 AM	Tube furnace set to 0
3/31/2010	12:08:22 AM	Run finished at 12:08 AM
3/31/2010	12:32:06 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/31/2010	12:32:06 AM	Recipe started at 12:32 AM
3/31/2010	12:32:06 AM	H2 valve closed
3/31/2010	12:32:06 AM	BCl3 valve closed
3/31/2010	12:32:06 AM	PH3 valve closed
3/31/2010	12:32:06 AM	SiCl4 pre valve closed
3/31/2010	12:32:06 AM	SiCl4 post valve closed
3/31/2010	12:32:06 AM	Main Vac valve closed
3/31/2010	12:32:06 AM	Bypass valve closed
3/31/2010	12:32:06 AM	Bubbler valve closed
3/31/2010	12:32:06 AM	Helium valve opened
3/31/2010	12:32:06 AM	Helium MFC set to  500.000000
3/31/2010	12:32:06 AM	H2 MFC set to  0.000000
3/31/2010	12:32:06 AM	BCl3 MFC set to  0.000000
3/31/2010	12:32:06 AM	SiCl4 MFC set to  0.000000
3/31/2010	12:32:06 AM	Bypass solenoid MFC set to  0.000000
3/31/2010	12:32:07 AM	Tube furnace set to 0
3/31/2010	12:32:08 AM	Helium valve closed
3/31/2010	12:32:08 AM	H2 valve closed
3/31/2010	12:32:08 AM	BCl3 valve closed
3/31/2010	12:32:08 AM	PH3 valve closed
3/31/2010	12:32:08 AM	SiCl4 pre valve closed
3/31/2010	12:32:08 AM	SiCl4 post valve closed
3/31/2010	12:32:08 AM	Main Vac valve closed
3/31/2010	12:32:08 AM	Bypass valve closed
3/31/2010	12:32:08 AM	Bubbler valve closed
3/31/2010	12:32:08 AM	Helium MFC set to  0.000000
3/31/2010	12:32:08 AM	H2 MFC set to  0.000000
3/31/2010	12:32:08 AM	BCl3 MFC set to  0.000000
3/31/2010	12:32:08 AM	SiCl4 MFC set to  0.000000
3/31/2010	12:32:08 AM	Bypass solenoid MFC set to  0.000000
3/31/2010	12:32:08 AM	Tube furnace set to 0
3/31/2010	12:32:09 AM	Run finished at 12:32 AM
3/31/2010	12:32:09 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/31/2010	12:34:11 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/31/2010	12:34:12 AM	Recipe started at 12:34 AM
3/31/2010	12:34:12 AM	Helium valve closed
3/31/2010	12:34:12 AM	H2 valve closed
3/31/2010	12:34:12 AM	BCl3 valve closed
3/31/2010	12:34:12 AM	PH3 valve closed
3/31/2010	12:34:12 AM	SiCl4 pre valve closed
3/31/2010	12:34:12 AM	SiCl4 post valve closed
3/31/2010	12:34:12 AM	Main Vac valve closed
3/31/2010	12:34:12 AM	Bubbler valve closed
3/31/2010	12:34:12 AM	Bypass valve opened
3/31/2010	12:34:12 AM	Helium MFC set to  0.000000
3/31/2010	12:34:12 AM	H2 MFC set to  0.000000
3/31/2010	12:34:12 AM	BCl3 MFC set to  0.000000
3/31/2010	12:34:12 AM	SiCl4 MFC set to  0.000000
3/31/2010	12:34:12 AM	Bypass solenoid MFC set to  0.000000
3/31/2010	12:34:12 AM	Tube furnace set to 0
3/31/2010	12:34:43 AM	Helium valve closed
3/31/2010	12:34:43 AM	H2 valve closed
3/31/2010	12:34:43 AM	BCl3 valve closed
3/31/2010	12:34:43 AM	PH3 valve closed
3/31/2010	12:34:43 AM	SiCl4 pre valve closed
3/31/2010	12:34:43 AM	SiCl4 post valve closed
3/31/2010	12:34:43 AM	Bubbler valve closed
3/31/2010	12:34:43 AM	Main Vac valve opened
3/31/2010	12:34:43 AM	Bypass valve opened
3/31/2010	12:34:43 AM	Helium MFC set to  0.000000
3/31/2010	12:34:43 AM	H2 MFC set to  0.000000
3/31/2010	12:34:43 AM	BCl3 MFC set to  0.000000
3/31/2010	12:34:43 AM	SiCl4 MFC set to  0.000000
3/31/2010	12:34:43 AM	Bypass solenoid MFC set to  0.000000
3/31/2010	12:34:43 AM	Tube furnace set to 0
3/31/2010	12:34:43 AM	Run finished at 12:34 AM
3/31/2010	12:34:43 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/31/2010	8:47:16 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/31/2010	8:47:17 AM	Recipe started at 8:47 AM
3/31/2010	8:47:17 AM	H2 valve closed
3/31/2010	8:47:17 AM	BCl3 valve closed
3/31/2010	8:47:17 AM	PH3 valve closed
3/31/2010	8:47:17 AM	SiCl4 pre valve closed
3/31/2010	8:47:17 AM	SiCl4 post valve closed
3/31/2010	8:47:17 AM	Main Vac valve closed
3/31/2010	8:47:17 AM	Bypass valve closed
3/31/2010	8:47:17 AM	Bubbler valve closed
3/31/2010	8:47:17 AM	Helium valve opened
3/31/2010	8:47:17 AM	Helium MFC set to  500.000000
3/31/2010	8:47:17 AM	H2 MFC set to  0.000000
3/31/2010	8:47:17 AM	BCl3 MFC set to  0.000000
3/31/2010	8:47:17 AM	SiCl4 MFC set to  0.000000
3/31/2010	8:47:17 AM	Bypass solenoid MFC set to  0.000000
3/31/2010	8:47:17 AM	Tube furnace set to 0
3/31/2010	8:48:37 AM	Helium valve closed
3/31/2010	8:48:37 AM	H2 valve closed
3/31/2010	8:48:37 AM	BCl3 valve closed
3/31/2010	8:48:37 AM	PH3 valve closed
3/31/2010	8:48:37 AM	SiCl4 pre valve closed
3/31/2010	8:48:37 AM	SiCl4 post valve closed
3/31/2010	8:48:37 AM	Main Vac valve closed
3/31/2010	8:48:37 AM	Bypass valve closed
3/31/2010	8:48:37 AM	Bubbler valve closed
3/31/2010	8:48:37 AM	Helium MFC set to  0.000000
3/31/2010	8:48:37 AM	H2 MFC set to  0.000000
3/31/2010	8:48:37 AM	BCl3 MFC set to  0.000000
3/31/2010	8:48:37 AM	SiCl4 MFC set to  0.000000
3/31/2010	8:48:37 AM	Bypass solenoid MFC set to  0.000000
3/31/2010	8:48:37 AM	Tube furnace set to 0
3/31/2010	8:48:38 AM	Run finished at 8:48 AM
3/31/2010	8:48:38 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/31/2010	9:00:07 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/31/2010	9:00:08 AM	Recipe started at 9:00 AM
3/31/2010	9:00:08 AM	Helium valve closed
3/31/2010	9:00:08 AM	H2 valve closed
3/31/2010	9:00:08 AM	BCl3 valve closed
3/31/2010	9:00:08 AM	PH3 valve closed
3/31/2010	9:00:08 AM	SiCl4 pre valve closed
3/31/2010	9:00:08 AM	SiCl4 post valve closed
3/31/2010	9:00:08 AM	Main Vac valve closed
3/31/2010	9:00:08 AM	Bubbler valve closed
3/31/2010	9:00:08 AM	Bypass valve opened
3/31/2010	9:00:08 AM	Helium MFC set to  0.000000
3/31/2010	9:00:08 AM	H2 MFC set to  0.000000
3/31/2010	9:00:08 AM	BCl3 MFC set to  0.000000
3/31/2010	9:00:08 AM	SiCl4 MFC set to  0.000000
3/31/2010	9:00:08 AM	Bypass solenoid MFC set to  0.000000
3/31/2010	9:00:08 AM	Tube furnace set to 0
3/31/2010	9:00:39 AM	Helium valve closed
3/31/2010	9:00:39 AM	H2 valve closed
3/31/2010	9:00:39 AM	BCl3 valve closed
3/31/2010	9:00:39 AM	PH3 valve closed
3/31/2010	9:00:39 AM	SiCl4 pre valve closed
3/31/2010	9:00:39 AM	SiCl4 post valve closed
3/31/2010	9:00:39 AM	Bubbler valve closed
3/31/2010	9:00:39 AM	Main Vac valve opened
3/31/2010	9:00:39 AM	Bypass valve opened
3/31/2010	9:00:39 AM	Helium MFC set to  0.000000
3/31/2010	9:00:39 AM	H2 MFC set to  0.000000
3/31/2010	9:00:39 AM	BCl3 MFC set to  0.000000
3/31/2010	9:00:39 AM	SiCl4 MFC set to  0.000000
3/31/2010	9:00:39 AM	Bypass solenoid MFC set to  0.000000
3/31/2010	9:00:39 AM	Tube furnace set to 0
3/31/2010	9:00:40 AM	Run finished at 9:00 AM
3/31/2010	9:00:40 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/31/2010	9:01:34 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/31/2010	9:01:35 AM	Recipe started at 9:01 AM
3/31/2010	9:01:35 AM	H2 valve closed
3/31/2010	9:01:35 AM	BCl3 valve closed
3/31/2010	9:01:35 AM	PH3 valve closed
3/31/2010	9:01:35 AM	SiCl4 pre valve closed
3/31/2010	9:01:35 AM	SiCl4 post valve closed
3/31/2010	9:01:35 AM	Main Vac valve closed
3/31/2010	9:01:35 AM	Bypass valve closed
3/31/2010	9:01:35 AM	Bubbler valve closed
3/31/2010	9:01:35 AM	Helium valve opened
3/31/2010	9:01:35 AM	Helium MFC set to  500.000000
3/31/2010	9:01:35 AM	H2 MFC set to  0.000000
3/31/2010	9:01:35 AM	BCl3 MFC set to  0.000000
3/31/2010	9:01:35 AM	SiCl4 MFC set to  0.000000
3/31/2010	9:01:35 AM	Bypass solenoid MFC set to  0.000000
3/31/2010	9:01:35 AM	Tube furnace set to 0
3/31/2010	9:02:55 AM	Helium valve closed
3/31/2010	9:02:55 AM	H2 valve closed
3/31/2010	9:02:55 AM	BCl3 valve closed
3/31/2010	9:02:55 AM	PH3 valve closed
3/31/2010	9:02:55 AM	SiCl4 pre valve closed
3/31/2010	9:02:55 AM	SiCl4 post valve closed
3/31/2010	9:02:55 AM	Main Vac valve closed
3/31/2010	9:02:55 AM	Bypass valve closed
3/31/2010	9:02:55 AM	Bubbler valve closed
3/31/2010	9:02:55 AM	Helium MFC set to  0.000000
3/31/2010	9:02:55 AM	H2 MFC set to  0.000000
3/31/2010	9:02:55 AM	BCl3 MFC set to  0.000000
3/31/2010	9:02:55 AM	SiCl4 MFC set to  0.000000
3/31/2010	9:02:55 AM	Bypass solenoid MFC set to  0.000000
3/31/2010	9:02:55 AM	Tube furnace set to 0
3/31/2010	9:02:55 AM	Run finished at 9:02 AM
3/31/2010	9:02:55 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/31/2010	9:03:06 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/31/2010	9:03:07 AM	Recipe started at 9:03 AM
3/31/2010	9:03:07 AM	Helium valve closed
3/31/2010	9:03:07 AM	H2 valve closed
3/31/2010	9:03:07 AM	BCl3 valve closed
3/31/2010	9:03:07 AM	PH3 valve closed
3/31/2010	9:03:07 AM	SiCl4 pre valve closed
3/31/2010	9:03:07 AM	SiCl4 post valve closed
3/31/2010	9:03:07 AM	Main Vac valve closed
3/31/2010	9:03:07 AM	Bubbler valve closed
3/31/2010	9:03:07 AM	Bypass valve opened
3/31/2010	9:03:07 AM	Helium MFC set to  0.000000
3/31/2010	9:03:07 AM	H2 MFC set to  0.000000
3/31/2010	9:03:07 AM	BCl3 MFC set to  0.000000
3/31/2010	9:03:07 AM	SiCl4 MFC set to  0.000000
3/31/2010	9:03:07 AM	Bypass solenoid MFC set to  0.000000
3/31/2010	9:03:07 AM	Tube furnace set to 0
3/31/2010	9:03:29 AM	Helium valve closed
3/31/2010	9:03:29 AM	H2 valve closed
3/31/2010	9:03:29 AM	BCl3 valve closed
3/31/2010	9:03:29 AM	PH3 valve closed
3/31/2010	9:03:29 AM	SiCl4 pre valve closed
3/31/2010	9:03:29 AM	SiCl4 post valve closed
3/31/2010	9:03:29 AM	Bubbler valve closed
3/31/2010	9:03:29 AM	Main Vac valve opened
3/31/2010	9:03:29 AM	Bypass valve opened
3/31/2010	9:03:29 AM	Helium MFC set to  0.000000
3/31/2010	9:03:29 AM	H2 MFC set to  0.000000
3/31/2010	9:03:29 AM	BCl3 MFC set to  0.000000
3/31/2010	9:03:29 AM	SiCl4 MFC set to  0.000000
3/31/2010	9:03:29 AM	Bypass solenoid MFC set to  0.000000
3/31/2010	9:03:30 AM	Tube furnace set to 0
3/31/2010	9:03:30 AM	Run finished at 9:03 AM
3/31/2010	9:03:30 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/31/2010	9:05:34 AM	Helium MFC set to  100.000000
3/31/2010	9:05:37 AM	Helium valve opened
3/31/2010	9:08:03 AM	Helium valve closed
3/31/2010	9:08:04 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/31/2010	9:08:05 AM	Recipe started at 9:08 AM
3/31/2010	9:08:05 AM	Helium valve closed
3/31/2010	9:08:05 AM	H2 valve closed
3/31/2010	9:08:05 AM	BCl3 valve closed
3/31/2010	9:08:05 AM	PH3 valve closed
3/31/2010	9:08:05 AM	SiCl4 pre valve closed
3/31/2010	9:08:05 AM	SiCl4 post valve closed
3/31/2010	9:08:05 AM	Main Vac valve closed
3/31/2010	9:08:05 AM	Bubbler valve closed
3/31/2010	9:08:05 AM	Bypass valve opened
3/31/2010	9:08:05 AM	Helium MFC set to  0.000000
3/31/2010	9:08:05 AM	H2 MFC set to  0.000000
3/31/2010	9:08:05 AM	BCl3 MFC set to  0.000000
3/31/2010	9:08:05 AM	SiCl4 MFC set to  0.000000
3/31/2010	9:08:05 AM	Bypass solenoid MFC set to  0.000000
3/31/2010	9:08:05 AM	Tube furnace set to 0
3/31/2010	9:08:05 AM	Helium valve closed
3/31/2010	9:08:05 AM	H2 valve closed
3/31/2010	9:08:05 AM	BCl3 valve closed
3/31/2010	9:08:05 AM	PH3 valve closed
3/31/2010	9:08:05 AM	SiCl4 pre valve closed
3/31/2010	9:08:05 AM	SiCl4 post valve closed
3/31/2010	9:08:05 AM	Bubbler valve closed
3/31/2010	9:08:05 AM	Main Vac valve opened
3/31/2010	9:08:05 AM	Bypass valve opened
3/31/2010	9:08:05 AM	Helium MFC set to  0.000000
3/31/2010	9:08:05 AM	H2 MFC set to  0.000000
3/31/2010	9:08:05 AM	BCl3 MFC set to  0.000000
3/31/2010	9:08:05 AM	SiCl4 MFC set to  0.000000
3/31/2010	9:08:05 AM	Bypass solenoid MFC set to  0.000000
3/31/2010	9:08:05 AM	Tube furnace set to 0
3/31/2010	9:08:06 AM	Run finished at 9:08 AM
3/31/2010	9:08:06 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/31/2010	9:08:36 AM	Main Vac valve closed
3/31/2010	9:08:36 AM	Bypass valve closed
3/31/2010	9:08:48 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/31/2010	9:08:49 AM	Recipe started at 9:08 AM
3/31/2010	9:08:49 AM	Helium valve closed
3/31/2010	9:08:49 AM	H2 valve closed
3/31/2010	9:08:49 AM	BCl3 valve closed
3/31/2010	9:08:49 AM	PH3 valve closed
3/31/2010	9:08:49 AM	SiCl4 pre valve closed
3/31/2010	9:08:49 AM	SiCl4 post valve closed
3/31/2010	9:08:49 AM	Main Vac valve closed
3/31/2010	9:08:49 AM	Bubbler valve closed
3/31/2010	9:08:49 AM	Bypass valve opened
3/31/2010	9:08:49 AM	Helium MFC set to  0.000000
3/31/2010	9:08:49 AM	H2 MFC set to  0.000000
3/31/2010	9:08:49 AM	BCl3 MFC set to  0.000000
3/31/2010	9:08:49 AM	SiCl4 MFC set to  0.000000
3/31/2010	9:08:49 AM	Bypass solenoid MFC set to  0.000000
3/31/2010	9:08:49 AM	Tube furnace set to 0
3/31/2010	9:08:49 AM	Helium valve closed
3/31/2010	9:08:49 AM	H2 valve closed
3/31/2010	9:08:49 AM	BCl3 valve closed
3/31/2010	9:08:49 AM	PH3 valve closed
3/31/2010	9:08:49 AM	SiCl4 pre valve closed
3/31/2010	9:08:49 AM	SiCl4 post valve closed
3/31/2010	9:08:49 AM	Bubbler valve closed
3/31/2010	9:08:49 AM	Main Vac valve opened
3/31/2010	9:08:49 AM	Bypass valve opened
3/31/2010	9:08:49 AM	Helium MFC set to  0.000000
3/31/2010	9:08:49 AM	H2 MFC set to  0.000000
3/31/2010	9:08:49 AM	BCl3 MFC set to  0.000000
3/31/2010	9:08:49 AM	SiCl4 MFC set to  0.000000
3/31/2010	9:08:49 AM	Bypass solenoid MFC set to  0.000000
3/31/2010	9:08:49 AM	Tube furnace set to 0
3/31/2010	9:08:49 AM	Run finished at 9:08 AM
3/31/2010	9:08:49 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/31/2010	9:09:15 AM	Helium MFC set to  100.000000
3/31/2010	9:09:20 AM	Helium valve opened
3/31/2010	9:16:13 AM	Helium valve closed
3/31/2010	9:16:15 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/31/2010	9:16:15 AM	Recipe started at 9:16 AM
3/31/2010	9:16:15 AM	Helium valve closed
3/31/2010	9:16:15 AM	H2 valve closed
3/31/2010	9:16:15 AM	BCl3 valve closed
3/31/2010	9:16:15 AM	PH3 valve closed
3/31/2010	9:16:15 AM	SiCl4 pre valve closed
3/31/2010	9:16:15 AM	SiCl4 post valve closed
3/31/2010	9:16:16 AM	Main Vac valve closed
3/31/2010	9:16:16 AM	Bubbler valve closed
3/31/2010	9:16:16 AM	Bypass valve opened
3/31/2010	9:16:16 AM	Helium MFC set to  0.000000
3/31/2010	9:16:16 AM	H2 MFC set to  0.000000
3/31/2010	9:16:16 AM	BCl3 MFC set to  0.000000
3/31/2010	9:16:16 AM	SiCl4 MFC set to  0.000000
3/31/2010	9:16:16 AM	Bypass solenoid MFC set to  0.000000
3/31/2010	9:16:16 AM	Tube furnace set to 0
3/31/2010	9:16:16 AM	Helium valve closed
3/31/2010	9:16:16 AM	H2 valve closed
3/31/2010	9:16:16 AM	BCl3 valve closed
3/31/2010	9:16:16 AM	PH3 valve closed
3/31/2010	9:16:16 AM	SiCl4 pre valve closed
3/31/2010	9:16:16 AM	SiCl4 post valve closed
3/31/2010	9:16:16 AM	Bubbler valve closed
3/31/2010	9:16:16 AM	Main Vac valve opened
3/31/2010	9:16:16 AM	Bypass valve opened
3/31/2010	9:16:16 AM	Helium MFC set to  0.000000
3/31/2010	9:16:16 AM	H2 MFC set to  0.000000
3/31/2010	9:16:16 AM	BCl3 MFC set to  0.000000
3/31/2010	9:16:16 AM	SiCl4 MFC set to  0.000000
3/31/2010	9:16:16 AM	Bypass solenoid MFC set to  0.000000
3/31/2010	9:16:16 AM	Tube furnace set to 0
3/31/2010	9:16:16 AM	Run finished at 9:16 AM
3/31/2010	9:16:16 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/31/2010	9:22:53 AM	Helium MFC set to  100.000000
3/31/2010	9:22:54 AM	Helium valve opened
3/31/2010	9:24:16 AM	Helium valve closed
3/31/2010	9:24:18 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/31/2010	9:24:18 AM	Recipe started at 9:24 AM
3/31/2010	9:24:18 AM	Helium valve closed
3/31/2010	9:24:18 AM	H2 valve closed
3/31/2010	9:24:18 AM	BCl3 valve closed
3/31/2010	9:24:18 AM	PH3 valve closed
3/31/2010	9:24:18 AM	SiCl4 pre valve closed
3/31/2010	9:24:18 AM	SiCl4 post valve closed
3/31/2010	9:24:18 AM	Main Vac valve closed
3/31/2010	9:24:18 AM	Bubbler valve closed
3/31/2010	9:24:18 AM	Bypass valve opened
3/31/2010	9:24:18 AM	Helium MFC set to  0.000000
3/31/2010	9:24:18 AM	H2 MFC set to  0.000000
3/31/2010	9:24:18 AM	BCl3 MFC set to  0.000000
3/31/2010	9:24:18 AM	SiCl4 MFC set to  0.000000
3/31/2010	9:24:18 AM	Bypass solenoid MFC set to  0.000000
3/31/2010	9:24:19 AM	Tube furnace set to 0
3/31/2010	9:24:19 AM	Helium valve closed
3/31/2010	9:24:19 AM	H2 valve closed
3/31/2010	9:24:19 AM	BCl3 valve closed
3/31/2010	9:24:19 AM	PH3 valve closed
3/31/2010	9:24:19 AM	SiCl4 pre valve closed
3/31/2010	9:24:19 AM	SiCl4 post valve closed
3/31/2010	9:24:19 AM	Bubbler valve closed
3/31/2010	9:24:19 AM	Main Vac valve opened
3/31/2010	9:24:19 AM	Bypass valve opened
3/31/2010	9:24:19 AM	Helium MFC set to  0.000000
3/31/2010	9:24:19 AM	H2 MFC set to  0.000000
3/31/2010	9:24:19 AM	BCl3 MFC set to  0.000000
3/31/2010	9:24:19 AM	SiCl4 MFC set to  0.000000
3/31/2010	9:24:19 AM	Bypass solenoid MFC set to  0.000000
3/31/2010	9:24:19 AM	Tube furnace set to 0
3/31/2010	9:24:19 AM	Run finished at 9:24 AM
3/31/2010	9:24:19 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/31/2010	9:25:58 AM	Recipe started at 9:25 AM
3/31/2010	9:25:58 AM	Helium valve closed
3/31/2010	9:25:58 AM	BCl3 valve closed
3/31/2010	9:25:58 AM	PH3 valve closed
3/31/2010	9:25:58 AM	SiCl4 pre valve closed
3/31/2010	9:25:58 AM	SiCl4 post valve closed
3/31/2010	9:25:58 AM	Main Vac valve closed
3/31/2010	9:25:58 AM	Bypass valve closed
3/31/2010	9:25:58 AM	Bubbler valve closed
3/31/2010	9:25:58 AM	H2 valve opened
3/31/2010	9:25:58 AM	Helium MFC set to  0.000000
3/31/2010	9:25:58 AM	H2 MFC set to  500.000000
3/31/2010	9:25:58 AM	BCl3 MFC set to  0.000000
3/31/2010	9:25:58 AM	SiCl4 MFC set to  0.000000
3/31/2010	9:25:58 AM	Bypass solenoid MFC set to  0.000000
3/31/2010	9:25:58 AM	Tube furnace set to 0
3/31/2010	9:27:21 AM	Helium valve closed
3/31/2010	9:27:21 AM	BCl3 valve closed
3/31/2010	9:27:21 AM	PH3 valve closed
3/31/2010	9:27:21 AM	SiCl4 pre valve closed
3/31/2010	9:27:21 AM	SiCl4 post valve closed
3/31/2010	9:27:21 AM	Main Vac valve closed
3/31/2010	9:27:21 AM	Bypass valve closed
3/31/2010	9:27:21 AM	H2 valve opened
3/31/2010	9:27:21 AM	Bubbler valve opened
3/31/2010	9:27:21 AM	Helium MFC set to  0.000000
3/31/2010	9:27:21 AM	H2 MFC set to  500.000000
3/31/2010	9:27:21 AM	BCl3 MFC set to  0.000000
3/31/2010	9:27:21 AM	SiCl4 MFC set to  0.000000
3/31/2010	9:27:21 AM	Bypass solenoid MFC set to  0.000000
3/31/2010	9:27:21 AM	Tube furnace set to 1000
3/31/2010	9:47:21 AM	Helium valve closed
3/31/2010	9:47:21 AM	PH3 valve closed
3/31/2010	9:47:21 AM	Main Vac valve closed
3/31/2010	9:47:21 AM	Bypass valve closed
3/31/2010	9:47:21 AM	H2 valve opened
3/31/2010	9:47:21 AM	BCl3 valve opened
3/31/2010	9:47:21 AM	SiCl4 pre valve opened
3/31/2010	9:47:21 AM	SiCl4 post valve opened
3/31/2010	9:47:21 AM	Bubbler valve opened
3/31/2010	9:47:21 AM	Helium MFC set to  0.000000
3/31/2010	9:47:21 AM	H2 MFC set to  500.000000
3/31/2010	9:47:21 AM	BCl3 MFC set to  35.000000
3/31/2010	9:47:21 AM	SiCl4 MFC set to  400.000000
3/31/2010	9:47:21 AM	Bypass solenoid MFC set to  0.000000
3/31/2010	9:47:21 AM	Tube furnace set to 1000
3/31/2010	10:07:21 AM	H2 valve closed
3/31/2010	10:07:21 AM	BCl3 valve closed
3/31/2010	10:07:21 AM	PH3 valve closed
3/31/2010	10:07:21 AM	SiCl4 pre valve closed
3/31/2010	10:07:21 AM	SiCl4 post valve closed
3/31/2010	10:07:21 AM	Main Vac valve closed
3/31/2010	10:07:21 AM	Bypass valve closed
3/31/2010	10:07:21 AM	Helium valve opened
3/31/2010	10:07:21 AM	Bubbler valve opened
3/31/2010	10:07:21 AM	Helium MFC set to  500.000000
3/31/2010	10:07:21 AM	H2 MFC set to  0.000000
3/31/2010	10:07:21 AM	BCl3 MFC set to  0.000000
3/31/2010	10:07:21 AM	SiCl4 MFC set to  0.000000
3/31/2010	10:07:21 AM	Bypass solenoid MFC set to  0.000000
3/31/2010	10:07:21 AM	Tube furnace set to 0
3/31/2010	10:27:21 AM	Helium valve closed
3/31/2010	10:27:21 AM	H2 valve closed
3/31/2010	10:27:21 AM	BCl3 valve closed
3/31/2010	10:27:21 AM	PH3 valve closed
3/31/2010	10:27:21 AM	SiCl4 pre valve closed
3/31/2010	10:27:21 AM	SiCl4 post valve closed
3/31/2010	10:27:21 AM	Main Vac valve closed
3/31/2010	10:27:21 AM	Bypass valve closed
3/31/2010	10:27:21 AM	Bubbler valve closed
3/31/2010	10:27:21 AM	Helium MFC set to  0.000000
3/31/2010	10:27:21 AM	H2 MFC set to  0.000000
3/31/2010	10:27:21 AM	BCl3 MFC set to  0.000000
3/31/2010	10:27:21 AM	SiCl4 MFC set to  0.000000
3/31/2010	10:27:21 AM	Bypass solenoid MFC set to  0.000000
3/31/2010	10:27:21 AM	Tube furnace set to 0
3/31/2010	10:27:22 AM	Run finished at 10:27 AM
3/31/2010	10:38:19 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/31/2010	10:38:20 AM	Recipe started at 10:38 AM
3/31/2010	10:38:20 AM	Helium valve closed
3/31/2010	10:38:20 AM	H2 valve closed
3/31/2010	10:38:20 AM	BCl3 valve closed
3/31/2010	10:38:20 AM	PH3 valve closed
3/31/2010	10:38:20 AM	SiCl4 pre valve closed
3/31/2010	10:38:20 AM	SiCl4 post valve closed
3/31/2010	10:38:20 AM	Main Vac valve closed
3/31/2010	10:38:20 AM	Bubbler valve closed
3/31/2010	10:38:20 AM	Bypass valve opened
3/31/2010	10:38:20 AM	Helium MFC set to  0.000000
3/31/2010	10:38:20 AM	H2 MFC set to  0.000000
3/31/2010	10:38:20 AM	BCl3 MFC set to  0.000000
3/31/2010	10:38:20 AM	SiCl4 MFC set to  0.000000
3/31/2010	10:38:20 AM	Bypass solenoid MFC set to  0.000000
3/31/2010	10:38:20 AM	Tube furnace set to 0
3/31/2010	10:38:51 AM	Helium valve closed
3/31/2010	10:38:51 AM	H2 valve closed
3/31/2010	10:38:51 AM	BCl3 valve closed
3/31/2010	10:38:51 AM	PH3 valve closed
3/31/2010	10:38:51 AM	SiCl4 pre valve closed
3/31/2010	10:38:51 AM	SiCl4 post valve closed
3/31/2010	10:38:51 AM	Bubbler valve closed
3/31/2010	10:38:51 AM	Main Vac valve opened
3/31/2010	10:38:51 AM	Bypass valve opened
3/31/2010	10:38:51 AM	Helium MFC set to  0.000000
3/31/2010	10:38:51 AM	H2 MFC set to  0.000000
3/31/2010	10:38:51 AM	BCl3 MFC set to  0.000000
3/31/2010	10:38:51 AM	SiCl4 MFC set to  0.000000
3/31/2010	10:38:51 AM	Bypass solenoid MFC set to  0.000000
3/31/2010	10:38:52 AM	Tube furnace set to 0
3/31/2010	10:38:52 AM	Run finished at 10:38 AM
3/31/2010	10:38:52 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/31/2010	10:39:31 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/31/2010	10:39:31 AM	Recipe started at 10:39 AM
3/31/2010	10:39:31 AM	H2 valve closed
3/31/2010	10:39:31 AM	BCl3 valve closed
3/31/2010	10:39:31 AM	PH3 valve closed
3/31/2010	10:39:31 AM	SiCl4 pre valve closed
3/31/2010	10:39:31 AM	SiCl4 post valve closed
3/31/2010	10:39:31 AM	Main Vac valve closed
3/31/2010	10:39:31 AM	Bypass valve closed
3/31/2010	10:39:31 AM	Bubbler valve closed
3/31/2010	10:39:31 AM	Helium valve opened
3/31/2010	10:39:31 AM	Helium MFC set to  500.000000
3/31/2010	10:39:31 AM	H2 MFC set to  0.000000
3/31/2010	10:39:31 AM	BCl3 MFC set to  0.000000
3/31/2010	10:39:31 AM	SiCl4 MFC set to  0.000000
3/31/2010	10:39:31 AM	Bypass solenoid MFC set to  0.000000
3/31/2010	10:39:32 AM	Tube furnace set to 0
3/31/2010	10:40:50 AM	Helium valve closed
3/31/2010	10:40:50 AM	H2 valve closed
3/31/2010	10:40:50 AM	BCl3 valve closed
3/31/2010	10:40:50 AM	PH3 valve closed
3/31/2010	10:40:50 AM	SiCl4 pre valve closed
3/31/2010	10:40:50 AM	SiCl4 post valve closed
3/31/2010	10:40:50 AM	Main Vac valve closed
3/31/2010	10:40:50 AM	Bypass valve closed
3/31/2010	10:40:50 AM	Bubbler valve closed
3/31/2010	10:40:50 AM	Helium MFC set to  0.000000
3/31/2010	10:40:50 AM	H2 MFC set to  0.000000
3/31/2010	10:40:50 AM	BCl3 MFC set to  0.000000
3/31/2010	10:40:50 AM	SiCl4 MFC set to  0.000000
3/31/2010	10:40:50 AM	Bypass solenoid MFC set to  0.000000
3/31/2010	10:40:50 AM	Tube furnace set to 0
3/31/2010	10:40:50 AM	Run finished at 10:40 AM
3/31/2010	10:40:50 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/31/2010	10:40:56 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/31/2010	10:40:57 AM	Recipe started at 10:40 AM
3/31/2010	10:40:57 AM	Helium valve closed
3/31/2010	10:40:57 AM	H2 valve closed
3/31/2010	10:40:57 AM	BCl3 valve closed
3/31/2010	10:40:57 AM	PH3 valve closed
3/31/2010	10:40:57 AM	SiCl4 pre valve closed
3/31/2010	10:40:57 AM	SiCl4 post valve closed
3/31/2010	10:40:57 AM	Main Vac valve closed
3/31/2010	10:40:57 AM	Bubbler valve closed
3/31/2010	10:40:57 AM	Bypass valve opened
3/31/2010	10:40:57 AM	Helium MFC set to  0.000000
3/31/2010	10:40:57 AM	H2 MFC set to  0.000000
3/31/2010	10:40:57 AM	BCl3 MFC set to  0.000000
3/31/2010	10:40:57 AM	SiCl4 MFC set to  0.000000
3/31/2010	10:40:57 AM	Bypass solenoid MFC set to  0.000000
3/31/2010	10:40:57 AM	Tube furnace set to 0
3/31/2010	10:41:18 AM	Helium valve closed
3/31/2010	10:41:18 AM	H2 valve closed
3/31/2010	10:41:18 AM	BCl3 valve closed
3/31/2010	10:41:18 AM	PH3 valve closed
3/31/2010	10:41:18 AM	SiCl4 pre valve closed
3/31/2010	10:41:18 AM	SiCl4 post valve closed
3/31/2010	10:41:18 AM	Bubbler valve closed
3/31/2010	10:41:18 AM	Main Vac valve opened
3/31/2010	10:41:18 AM	Bypass valve opened
3/31/2010	10:41:18 AM	Helium MFC set to  0.000000
3/31/2010	10:41:18 AM	H2 MFC set to  0.000000
3/31/2010	10:41:18 AM	BCl3 MFC set to  0.000000
3/31/2010	10:41:18 AM	SiCl4 MFC set to  0.000000
3/31/2010	10:41:18 AM	Bypass solenoid MFC set to  0.000000
3/31/2010	10:41:19 AM	Tube furnace set to 0
3/31/2010	10:41:19 AM	Run finished at 10:41 AM
3/31/2010	10:41:19 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/31/2010	10:43:21 AM	Helium MFC set to  100.000000
3/31/2010	10:43:22 AM	Helium valve opened
3/31/2010	10:49:56 AM	Helium valve closed
3/31/2010	10:49:57 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/31/2010	10:49:58 AM	Recipe started at 10:49 AM
3/31/2010	10:49:58 AM	Helium valve closed
3/31/2010	10:49:58 AM	H2 valve closed
3/31/2010	10:49:58 AM	BCl3 valve closed
3/31/2010	10:49:58 AM	PH3 valve closed
3/31/2010	10:49:58 AM	SiCl4 pre valve closed
3/31/2010	10:49:58 AM	SiCl4 post valve closed
3/31/2010	10:49:58 AM	Main Vac valve closed
3/31/2010	10:49:58 AM	Bubbler valve closed
3/31/2010	10:49:58 AM	Bypass valve opened
3/31/2010	10:49:58 AM	Helium MFC set to  0.000000
3/31/2010	10:49:58 AM	H2 MFC set to  0.000000
3/31/2010	10:49:58 AM	BCl3 MFC set to  0.000000
3/31/2010	10:49:58 AM	SiCl4 MFC set to  0.000000
3/31/2010	10:49:58 AM	Bypass solenoid MFC set to  0.000000
3/31/2010	10:49:58 AM	Tube furnace set to 0
3/31/2010	10:49:58 AM	Helium valve closed
3/31/2010	10:49:58 AM	H2 valve closed
3/31/2010	10:49:58 AM	BCl3 valve closed
3/31/2010	10:49:58 AM	PH3 valve closed
3/31/2010	10:49:58 AM	SiCl4 pre valve closed
3/31/2010	10:49:58 AM	SiCl4 post valve closed
3/31/2010	10:49:58 AM	Bubbler valve closed
3/31/2010	10:49:58 AM	Main Vac valve opened
3/31/2010	10:49:58 AM	Bypass valve opened
3/31/2010	10:49:58 AM	Helium MFC set to  0.000000
3/31/2010	10:49:58 AM	H2 MFC set to  0.000000
3/31/2010	10:49:58 AM	BCl3 MFC set to  0.000000
3/31/2010	10:49:58 AM	SiCl4 MFC set to  0.000000
3/31/2010	10:49:58 AM	Bypass solenoid MFC set to  0.000000
3/31/2010	10:49:58 AM	Tube furnace set to 0
3/31/2010	10:49:58 AM	Run finished at 10:49 AM
3/31/2010	10:49:58 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/31/2010	10:51:11 AM	Helium MFC set to  100.000000
3/31/2010	10:51:18 AM	Helium valve opened
3/31/2010	10:52:51 AM	Helium valve closed
3/31/2010	10:52:52 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/31/2010	10:52:52 AM	Recipe started at 10:52 AM
3/31/2010	10:52:52 AM	Helium valve closed
3/31/2010	10:52:52 AM	H2 valve closed
3/31/2010	10:52:52 AM	BCl3 valve closed
3/31/2010	10:52:52 AM	PH3 valve closed
3/31/2010	10:52:52 AM	SiCl4 pre valve closed
3/31/2010	10:52:52 AM	SiCl4 post valve closed
3/31/2010	10:52:52 AM	Main Vac valve closed
3/31/2010	10:52:52 AM	Bubbler valve closed
3/31/2010	10:52:52 AM	Bypass valve opened
3/31/2010	10:52:52 AM	Helium MFC set to  0.000000
3/31/2010	10:52:52 AM	H2 MFC set to  0.000000
3/31/2010	10:52:52 AM	BCl3 MFC set to  0.000000
3/31/2010	10:52:52 AM	SiCl4 MFC set to  0.000000
3/31/2010	10:52:52 AM	Bypass solenoid MFC set to  0.000000
3/31/2010	10:52:52 AM	Tube furnace set to 0
3/31/2010	10:52:53 AM	Helium valve closed
3/31/2010	10:52:53 AM	H2 valve closed
3/31/2010	10:52:53 AM	BCl3 valve closed
3/31/2010	10:52:53 AM	PH3 valve closed
3/31/2010	10:52:53 AM	SiCl4 pre valve closed
3/31/2010	10:52:53 AM	SiCl4 post valve closed
3/31/2010	10:52:53 AM	Bubbler valve closed
3/31/2010	10:52:53 AM	Main Vac valve opened
3/31/2010	10:52:53 AM	Bypass valve opened
3/31/2010	10:52:53 AM	Helium MFC set to  0.000000
3/31/2010	10:52:53 AM	H2 MFC set to  0.000000
3/31/2010	10:52:53 AM	BCl3 MFC set to  0.000000
3/31/2010	10:52:53 AM	SiCl4 MFC set to  0.000000
3/31/2010	10:52:53 AM	Bypass solenoid MFC set to  0.000000
3/31/2010	10:52:53 AM	Tube furnace set to 0
3/31/2010	10:52:53 AM	Run finished at 10:52 AM
3/31/2010	10:52:53 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/31/2010	10:53:52 AM	Recipe started at 10:53 AM
3/31/2010	10:53:52 AM	Helium valve closed
3/31/2010	10:53:52 AM	BCl3 valve closed
3/31/2010	10:53:52 AM	PH3 valve closed
3/31/2010	10:53:52 AM	SiCl4 pre valve closed
3/31/2010	10:53:52 AM	SiCl4 post valve closed
3/31/2010	10:53:52 AM	Main Vac valve closed
3/31/2010	10:53:52 AM	Bypass valve closed
3/31/2010	10:53:52 AM	Bubbler valve closed
3/31/2010	10:53:52 AM	H2 valve opened
3/31/2010	10:53:52 AM	Helium MFC set to  0.000000
3/31/2010	10:53:52 AM	H2 MFC set to  500.000000
3/31/2010	10:53:52 AM	BCl3 MFC set to  0.000000
3/31/2010	10:53:52 AM	SiCl4 MFC set to  0.000000
3/31/2010	10:53:52 AM	Bypass solenoid MFC set to  0.000000
3/31/2010	10:53:52 AM	Tube furnace set to 0
3/31/2010	10:55:13 AM	Helium valve closed
3/31/2010	10:55:13 AM	BCl3 valve closed
3/31/2010	10:55:13 AM	PH3 valve closed
3/31/2010	10:55:13 AM	SiCl4 pre valve closed
3/31/2010	10:55:13 AM	SiCl4 post valve closed
3/31/2010	10:55:13 AM	Main Vac valve closed
3/31/2010	10:55:13 AM	Bypass valve closed
3/31/2010	10:55:13 AM	H2 valve opened
3/31/2010	10:55:13 AM	Bubbler valve opened
3/31/2010	10:55:13 AM	Helium MFC set to  0.000000
3/31/2010	10:55:13 AM	H2 MFC set to  500.000000
3/31/2010	10:55:13 AM	BCl3 MFC set to  0.000000
3/31/2010	10:55:13 AM	SiCl4 MFC set to  0.000000
3/31/2010	10:55:13 AM	Bypass solenoid MFC set to  0.000000
3/31/2010	10:55:14 AM	Tube furnace set to 1000
3/31/2010	11:15:14 AM	Helium valve closed
3/31/2010	11:15:14 AM	PH3 valve closed
3/31/2010	11:15:14 AM	Main Vac valve closed
3/31/2010	11:15:14 AM	Bypass valve closed
3/31/2010	11:15:14 AM	H2 valve opened
3/31/2010	11:15:14 AM	BCl3 valve opened
3/31/2010	11:15:14 AM	SiCl4 pre valve opened
3/31/2010	11:15:14 AM	SiCl4 post valve opened
3/31/2010	11:15:14 AM	Bubbler valve opened
3/31/2010	11:15:14 AM	Helium MFC set to  0.000000
3/31/2010	11:15:14 AM	H2 MFC set to  500.000000
3/31/2010	11:15:14 AM	BCl3 MFC set to  35.000000
3/31/2010	11:15:14 AM	SiCl4 MFC set to  400.000000
3/31/2010	11:15:14 AM	Bypass solenoid MFC set to  0.000000
3/31/2010	11:15:14 AM	Tube furnace set to 1000
3/31/2010	11:35:14 AM	H2 valve closed
3/31/2010	11:35:14 AM	BCl3 valve closed
3/31/2010	11:35:14 AM	PH3 valve closed
3/31/2010	11:35:14 AM	SiCl4 pre valve closed
3/31/2010	11:35:14 AM	SiCl4 post valve closed
3/31/2010	11:35:14 AM	Main Vac valve closed
3/31/2010	11:35:14 AM	Bypass valve closed
3/31/2010	11:35:14 AM	Helium valve opened
3/31/2010	11:35:14 AM	Bubbler valve opened
3/31/2010	11:35:14 AM	Helium MFC set to  500.000000
3/31/2010	11:35:14 AM	H2 MFC set to  0.000000
3/31/2010	11:35:14 AM	BCl3 MFC set to  0.000000
3/31/2010	11:35:14 AM	SiCl4 MFC set to  0.000000
3/31/2010	11:35:14 AM	Bypass solenoid MFC set to  0.000000
3/31/2010	11:35:14 AM	Tube furnace set to 0
3/31/2010	11:55:14 AM	Helium valve closed
3/31/2010	11:55:14 AM	H2 valve closed
3/31/2010	11:55:14 AM	BCl3 valve closed
3/31/2010	11:55:14 AM	PH3 valve closed
3/31/2010	11:55:14 AM	SiCl4 pre valve closed
3/31/2010	11:55:14 AM	SiCl4 post valve closed
3/31/2010	11:55:14 AM	Main Vac valve closed
3/31/2010	11:55:14 AM	Bypass valve closed
3/31/2010	11:55:14 AM	Bubbler valve closed
3/31/2010	11:55:14 AM	Helium MFC set to  0.000000
3/31/2010	11:55:14 AM	H2 MFC set to  0.000000
3/31/2010	11:55:14 AM	BCl3 MFC set to  0.000000
3/31/2010	11:55:14 AM	SiCl4 MFC set to  0.000000
3/31/2010	11:55:14 AM	Bypass solenoid MFC set to  0.000000
3/31/2010	11:55:14 AM	Tube furnace set to 0
3/31/2010	11:55:14 AM	Run finished at 11:55 AM
3/31/2010	1:33:15 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/31/2010	1:33:16 PM	Recipe started at 1:33 PM
3/31/2010	1:33:16 PM	Helium valve closed
3/31/2010	1:33:16 PM	H2 valve closed
3/31/2010	1:33:16 PM	BCl3 valve closed
3/31/2010	1:33:16 PM	PH3 valve closed
3/31/2010	1:33:16 PM	SiCl4 pre valve closed
3/31/2010	1:33:16 PM	SiCl4 post valve closed
3/31/2010	1:33:16 PM	Main Vac valve closed
3/31/2010	1:33:16 PM	Bubbler valve closed
3/31/2010	1:33:16 PM	Bypass valve opened
3/31/2010	1:33:16 PM	Helium MFC set to  0.000000
3/31/2010	1:33:16 PM	H2 MFC set to  0.000000
3/31/2010	1:33:16 PM	BCl3 MFC set to  0.000000
3/31/2010	1:33:16 PM	SiCl4 MFC set to  0.000000
3/31/2010	1:33:16 PM	Bypass solenoid MFC set to  0.000000
3/31/2010	1:33:16 PM	Tube furnace set to 0
3/31/2010	1:33:47 PM	Helium valve closed
3/31/2010	1:33:47 PM	H2 valve closed
3/31/2010	1:33:47 PM	BCl3 valve closed
3/31/2010	1:33:47 PM	PH3 valve closed
3/31/2010	1:33:47 PM	SiCl4 pre valve closed
3/31/2010	1:33:47 PM	SiCl4 post valve closed
3/31/2010	1:33:47 PM	Bubbler valve closed
3/31/2010	1:33:47 PM	Main Vac valve opened
3/31/2010	1:33:47 PM	Bypass valve opened
3/31/2010	1:33:47 PM	Helium MFC set to  0.000000
3/31/2010	1:33:47 PM	H2 MFC set to  0.000000
3/31/2010	1:33:47 PM	BCl3 MFC set to  0.000000
3/31/2010	1:33:47 PM	SiCl4 MFC set to  0.000000
3/31/2010	1:33:47 PM	Bypass solenoid MFC set to  0.000000
3/31/2010	1:33:48 PM	Tube furnace set to 0
3/31/2010	1:33:48 PM	Run finished at 1:33 PM
3/31/2010	1:33:48 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/31/2010	1:35:33 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/31/2010	1:35:34 PM	Recipe started at 1:35 PM
3/31/2010	1:35:34 PM	H2 valve closed
3/31/2010	1:35:34 PM	BCl3 valve closed
3/31/2010	1:35:34 PM	PH3 valve closed
3/31/2010	1:35:34 PM	SiCl4 pre valve closed
3/31/2010	1:35:34 PM	SiCl4 post valve closed
3/31/2010	1:35:34 PM	Main Vac valve closed
3/31/2010	1:35:34 PM	Bypass valve closed
3/31/2010	1:35:34 PM	Bubbler valve closed
3/31/2010	1:35:34 PM	Helium valve opened
3/31/2010	1:35:34 PM	Helium MFC set to  500.000000
3/31/2010	1:35:34 PM	H2 MFC set to  0.000000
3/31/2010	1:35:34 PM	BCl3 MFC set to  0.000000
3/31/2010	1:35:34 PM	SiCl4 MFC set to  0.000000
3/31/2010	1:35:34 PM	Bypass solenoid MFC set to  0.000000
3/31/2010	1:35:34 PM	Tube furnace set to 0
3/31/2010	1:36:54 PM	Helium valve closed
3/31/2010	1:36:54 PM	H2 valve closed
3/31/2010	1:36:54 PM	BCl3 valve closed
3/31/2010	1:36:54 PM	PH3 valve closed
3/31/2010	1:36:54 PM	SiCl4 pre valve closed
3/31/2010	1:36:54 PM	SiCl4 post valve closed
3/31/2010	1:36:54 PM	Main Vac valve closed
3/31/2010	1:36:54 PM	Bypass valve closed
3/31/2010	1:36:54 PM	Bubbler valve closed
3/31/2010	1:36:54 PM	Helium MFC set to  0.000000
3/31/2010	1:36:54 PM	H2 MFC set to  0.000000
3/31/2010	1:36:54 PM	BCl3 MFC set to  0.000000
3/31/2010	1:36:54 PM	SiCl4 MFC set to  0.000000
3/31/2010	1:36:54 PM	Bypass solenoid MFC set to  0.000000
3/31/2010	1:36:54 PM	Tube furnace set to 0
3/31/2010	1:36:54 PM	Run finished at 1:36 PM
3/31/2010	1:36:54 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/31/2010	1:39:02 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/31/2010	1:39:02 PM	Recipe started at 1:39 PM
3/31/2010	1:39:02 PM	Helium valve closed
3/31/2010	1:39:02 PM	H2 valve closed
3/31/2010	1:39:02 PM	BCl3 valve closed
3/31/2010	1:39:02 PM	PH3 valve closed
3/31/2010	1:39:02 PM	SiCl4 pre valve closed
3/31/2010	1:39:02 PM	SiCl4 post valve closed
3/31/2010	1:39:02 PM	Main Vac valve closed
3/31/2010	1:39:02 PM	Bubbler valve closed
3/31/2010	1:39:02 PM	Bypass valve opened
3/31/2010	1:39:02 PM	Helium MFC set to  0.000000
3/31/2010	1:39:02 PM	H2 MFC set to  0.000000
3/31/2010	1:39:02 PM	BCl3 MFC set to  0.000000
3/31/2010	1:39:02 PM	SiCl4 MFC set to  0.000000
3/31/2010	1:39:02 PM	Bypass solenoid MFC set to  0.000000
3/31/2010	1:39:03 PM	Tube furnace set to 0
3/31/2010	1:39:25 PM	Helium valve closed
3/31/2010	1:39:25 PM	H2 valve closed
3/31/2010	1:39:25 PM	BCl3 valve closed
3/31/2010	1:39:25 PM	PH3 valve closed
3/31/2010	1:39:25 PM	SiCl4 pre valve closed
3/31/2010	1:39:25 PM	SiCl4 post valve closed
3/31/2010	1:39:25 PM	Bubbler valve closed
3/31/2010	1:39:25 PM	Main Vac valve opened
3/31/2010	1:39:25 PM	Bypass valve opened
3/31/2010	1:39:25 PM	Helium MFC set to  0.000000
3/31/2010	1:39:25 PM	H2 MFC set to  0.000000
3/31/2010	1:39:25 PM	BCl3 MFC set to  0.000000
3/31/2010	1:39:25 PM	SiCl4 MFC set to  0.000000
3/31/2010	1:39:25 PM	Bypass solenoid MFC set to  0.000000
3/31/2010	1:39:25 PM	Tube furnace set to 0
3/31/2010	1:39:25 PM	Run finished at 1:39 PM
3/31/2010	1:39:25 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/31/2010	1:41:36 PM	Helium MFC set to  100.000000
3/31/2010	1:41:37 PM	Helium valve opened
3/31/2010	1:45:38 PM	Helium valve closed
3/31/2010	1:46:37 PM	Main Vac valve closed
3/31/2010	1:46:37 PM	Bypass valve closed
3/31/2010	1:47:00 PM	Bypass valve opened
3/31/2010	1:47:01 PM	Main Vac valve opened
3/31/2010	1:47:03 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/31/2010	1:47:03 PM	Recipe started at 1:47 PM
3/31/2010	1:47:03 PM	Helium valve closed
3/31/2010	1:47:03 PM	H2 valve closed
3/31/2010	1:47:03 PM	BCl3 valve closed
3/31/2010	1:47:03 PM	PH3 valve closed
3/31/2010	1:47:03 PM	SiCl4 pre valve closed
3/31/2010	1:47:03 PM	SiCl4 post valve closed
3/31/2010	1:47:03 PM	Main Vac valve closed
3/31/2010	1:47:03 PM	Bubbler valve closed
3/31/2010	1:47:03 PM	Bypass valve opened
3/31/2010	1:47:03 PM	Helium MFC set to  0.000000
3/31/2010	1:47:03 PM	H2 MFC set to  0.000000
3/31/2010	1:47:03 PM	BCl3 MFC set to  0.000000
3/31/2010	1:47:03 PM	SiCl4 MFC set to  0.000000
3/31/2010	1:47:03 PM	Bypass solenoid MFC set to  0.000000
3/31/2010	1:47:03 PM	Tube furnace set to 0
3/31/2010	1:47:04 PM	Helium valve closed
3/31/2010	1:47:04 PM	H2 valve closed
3/31/2010	1:47:04 PM	BCl3 valve closed
3/31/2010	1:47:04 PM	PH3 valve closed
3/31/2010	1:47:04 PM	SiCl4 pre valve closed
3/31/2010	1:47:04 PM	SiCl4 post valve closed
3/31/2010	1:47:04 PM	Bubbler valve closed
3/31/2010	1:47:04 PM	Main Vac valve opened
3/31/2010	1:47:04 PM	Bypass valve opened
3/31/2010	1:47:04 PM	Helium MFC set to  0.000000
3/31/2010	1:47:04 PM	H2 MFC set to  0.000000
3/31/2010	1:47:04 PM	BCl3 MFC set to  0.000000
3/31/2010	1:47:04 PM	SiCl4 MFC set to  0.000000
3/31/2010	1:47:04 PM	Bypass solenoid MFC set to  0.000000
3/31/2010	1:47:04 PM	Tube furnace set to 0
3/31/2010	1:47:04 PM	Run finished at 1:47 PM
3/31/2010	1:47:04 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/31/2010	1:47:26 PM	Recipe started at 1:47 PM
3/31/2010	1:47:26 PM	Helium valve closed
3/31/2010	1:47:26 PM	BCl3 valve closed
3/31/2010	1:47:26 PM	PH3 valve closed
3/31/2010	1:47:26 PM	SiCl4 pre valve closed
3/31/2010	1:47:26 PM	SiCl4 post valve closed
3/31/2010	1:47:26 PM	Main Vac valve closed
3/31/2010	1:47:26 PM	Bypass valve closed
3/31/2010	1:47:26 PM	Bubbler valve closed
3/31/2010	1:47:26 PM	H2 valve opened
3/31/2010	1:47:26 PM	Helium MFC set to  0.000000
3/31/2010	1:47:26 PM	H2 MFC set to  500.000000
3/31/2010	1:47:26 PM	BCl3 MFC set to  0.000000
3/31/2010	1:47:26 PM	SiCl4 MFC set to  0.000000
3/31/2010	1:47:26 PM	Bypass solenoid MFC set to  0.000000
3/31/2010	1:47:27 PM	Tube furnace set to 0
3/31/2010	1:48:49 PM	Helium valve closed
3/31/2010	1:48:49 PM	BCl3 valve closed
3/31/2010	1:48:49 PM	PH3 valve closed
3/31/2010	1:48:49 PM	SiCl4 pre valve closed
3/31/2010	1:48:49 PM	SiCl4 post valve closed
3/31/2010	1:48:49 PM	Main Vac valve closed
3/31/2010	1:48:49 PM	Bypass valve closed
3/31/2010	1:48:49 PM	H2 valve opened
3/31/2010	1:48:49 PM	Bubbler valve opened
3/31/2010	1:48:49 PM	Helium MFC set to  0.000000
3/31/2010	1:48:49 PM	H2 MFC set to  500.000000
3/31/2010	1:48:49 PM	BCl3 MFC set to  0.000000
3/31/2010	1:48:49 PM	SiCl4 MFC set to  0.000000
3/31/2010	1:48:49 PM	Bypass solenoid MFC set to  0.000000
3/31/2010	1:48:49 PM	Tube furnace set to 1000
3/31/2010	2:08:49 PM	Helium valve closed
3/31/2010	2:08:49 PM	PH3 valve closed
3/31/2010	2:08:49 PM	Main Vac valve closed
3/31/2010	2:08:49 PM	Bypass valve closed
3/31/2010	2:08:49 PM	H2 valve opened
3/31/2010	2:08:49 PM	BCl3 valve opened
3/31/2010	2:08:49 PM	SiCl4 pre valve opened
3/31/2010	2:08:49 PM	SiCl4 post valve opened
3/31/2010	2:08:49 PM	Bubbler valve opened
3/31/2010	2:08:49 PM	Helium MFC set to  0.000000
3/31/2010	2:08:49 PM	H2 MFC set to  500.000000
3/31/2010	2:08:49 PM	BCl3 MFC set to  35.000000
3/31/2010	2:08:49 PM	SiCl4 MFC set to  400.000000
3/31/2010	2:08:49 PM	Bypass solenoid MFC set to  0.000000
3/31/2010	2:08:49 PM	Tube furnace set to 1000
3/31/2010	2:28:49 PM	H2 valve closed
3/31/2010	2:28:49 PM	BCl3 valve closed
3/31/2010	2:28:49 PM	PH3 valve closed
3/31/2010	2:28:49 PM	SiCl4 pre valve closed
3/31/2010	2:28:49 PM	SiCl4 post valve closed
3/31/2010	2:28:49 PM	Main Vac valve closed
3/31/2010	2:28:49 PM	Bypass valve closed
3/31/2010	2:28:49 PM	Helium valve opened
3/31/2010	2:28:49 PM	Bubbler valve opened
3/31/2010	2:28:49 PM	Helium MFC set to  500.000000
3/31/2010	2:28:49 PM	H2 MFC set to  0.000000
3/31/2010	2:28:49 PM	BCl3 MFC set to  0.000000
3/31/2010	2:28:49 PM	SiCl4 MFC set to  0.000000
3/31/2010	2:28:49 PM	Bypass solenoid MFC set to  0.000000
3/31/2010	2:28:49 PM	Tube furnace set to 0
3/31/2010	2:48:49 PM	Helium valve closed
3/31/2010	2:48:49 PM	H2 valve closed
3/31/2010	2:48:49 PM	BCl3 valve closed
3/31/2010	2:48:49 PM	PH3 valve closed
3/31/2010	2:48:49 PM	SiCl4 pre valve closed
3/31/2010	2:48:49 PM	SiCl4 post valve closed
3/31/2010	2:48:49 PM	Main Vac valve closed
3/31/2010	2:48:49 PM	Bypass valve closed
3/31/2010	2:48:49 PM	Bubbler valve closed
3/31/2010	2:48:49 PM	Helium MFC set to  0.000000
3/31/2010	2:48:49 PM	H2 MFC set to  0.000000
3/31/2010	2:48:49 PM	BCl3 MFC set to  0.000000
3/31/2010	2:48:49 PM	SiCl4 MFC set to  0.000000
3/31/2010	2:48:49 PM	Bypass solenoid MFC set to  0.000000
3/31/2010	2:48:49 PM	Tube furnace set to 0
3/31/2010	2:48:50 PM	Run finished at 2:48 PM
3/31/2010	2:56:09 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/31/2010	2:56:10 PM	Recipe started at 2:56 PM
3/31/2010	2:56:10 PM	Helium valve closed
3/31/2010	2:56:10 PM	H2 valve closed
3/31/2010	2:56:10 PM	BCl3 valve closed
3/31/2010	2:56:10 PM	PH3 valve closed
3/31/2010	2:56:10 PM	SiCl4 pre valve closed
3/31/2010	2:56:10 PM	SiCl4 post valve closed
3/31/2010	2:56:10 PM	Main Vac valve closed
3/31/2010	2:56:10 PM	Bubbler valve closed
3/31/2010	2:56:10 PM	Bypass valve opened
3/31/2010	2:56:10 PM	Helium MFC set to  0.000000
3/31/2010	2:56:10 PM	H2 MFC set to  0.000000
3/31/2010	2:56:10 PM	BCl3 MFC set to  0.000000
3/31/2010	2:56:10 PM	SiCl4 MFC set to  0.000000
3/31/2010	2:56:10 PM	Bypass solenoid MFC set to  0.000000
3/31/2010	2:56:10 PM	Tube furnace set to 0
3/31/2010	2:56:41 PM	Helium valve closed
3/31/2010	2:56:41 PM	H2 valve closed
3/31/2010	2:56:41 PM	BCl3 valve closed
3/31/2010	2:56:41 PM	PH3 valve closed
3/31/2010	2:56:41 PM	SiCl4 pre valve closed
3/31/2010	2:56:41 PM	SiCl4 post valve closed
3/31/2010	2:56:41 PM	Bubbler valve closed
3/31/2010	2:56:41 PM	Main Vac valve opened
3/31/2010	2:56:41 PM	Bypass valve opened
3/31/2010	2:56:41 PM	Helium MFC set to  0.000000
3/31/2010	2:56:41 PM	H2 MFC set to  0.000000
3/31/2010	2:56:41 PM	BCl3 MFC set to  0.000000
3/31/2010	2:56:41 PM	SiCl4 MFC set to  0.000000
3/31/2010	2:56:41 PM	Bypass solenoid MFC set to  0.000000
3/31/2010	2:56:41 PM	Tube furnace set to 0
3/31/2010	2:56:41 PM	Run finished at 2:56 PM
3/31/2010	2:56:41 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/31/2010	2:58:18 PM	Helium MFC set to  100.000000
3/31/2010	2:58:19 PM	Helium valve opened
3/31/2010	3:00:51 PM	Helium valve closed
3/31/2010	3:00:53 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/31/2010	3:00:54 PM	Recipe started at 3:00 PM
3/31/2010	3:00:54 PM	Helium valve closed
3/31/2010	3:00:54 PM	H2 valve closed
3/31/2010	3:00:54 PM	BCl3 valve closed
3/31/2010	3:00:54 PM	PH3 valve closed
3/31/2010	3:00:54 PM	SiCl4 pre valve closed
3/31/2010	3:00:54 PM	SiCl4 post valve closed
3/31/2010	3:00:54 PM	Main Vac valve closed
3/31/2010	3:00:54 PM	Bubbler valve closed
3/31/2010	3:00:54 PM	Bypass valve opened
3/31/2010	3:00:54 PM	Helium MFC set to  0.000000
3/31/2010	3:00:54 PM	H2 MFC set to  0.000000
3/31/2010	3:00:54 PM	BCl3 MFC set to  0.000000
3/31/2010	3:00:54 PM	SiCl4 MFC set to  0.000000
3/31/2010	3:00:54 PM	Bypass solenoid MFC set to  0.000000
3/31/2010	3:00:54 PM	Tube furnace set to 0
3/31/2010	3:00:54 PM	Helium valve closed
3/31/2010	3:00:54 PM	H2 valve closed
3/31/2010	3:00:54 PM	BCl3 valve closed
3/31/2010	3:00:54 PM	PH3 valve closed
3/31/2010	3:00:54 PM	SiCl4 pre valve closed
3/31/2010	3:00:54 PM	SiCl4 post valve closed
3/31/2010	3:00:54 PM	Bubbler valve closed
3/31/2010	3:00:54 PM	Main Vac valve opened
3/31/2010	3:00:54 PM	Bypass valve opened
3/31/2010	3:00:54 PM	Helium MFC set to  0.000000
3/31/2010	3:00:54 PM	H2 MFC set to  0.000000
3/31/2010	3:00:54 PM	BCl3 MFC set to  0.000000
3/31/2010	3:00:54 PM	SiCl4 MFC set to  0.000000
3/31/2010	3:00:54 PM	Bypass solenoid MFC set to  0.000000
3/31/2010	3:00:54 PM	Tube furnace set to 0
3/31/2010	3:00:54 PM	Run finished at 3:00 PM
3/31/2010	3:00:54 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/31/2010	3:01:30 PM	Helium MFC set to  100.000000
3/31/2010	3:01:31 PM	Helium valve opened
3/31/2010	3:06:38 PM	Helium valve closed
3/31/2010	3:06:40 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/31/2010	3:06:41 PM	Recipe started at 3:06 PM
3/31/2010	3:06:41 PM	Helium valve closed
3/31/2010	3:06:41 PM	H2 valve closed
3/31/2010	3:06:41 PM	BCl3 valve closed
3/31/2010	3:06:41 PM	PH3 valve closed
3/31/2010	3:06:41 PM	SiCl4 pre valve closed
3/31/2010	3:06:41 PM	SiCl4 post valve closed
3/31/2010	3:06:41 PM	Main Vac valve closed
3/31/2010	3:06:41 PM	Bubbler valve closed
3/31/2010	3:06:41 PM	Bypass valve opened
3/31/2010	3:06:41 PM	Helium MFC set to  0.000000
3/31/2010	3:06:41 PM	H2 MFC set to  0.000000
3/31/2010	3:06:41 PM	BCl3 MFC set to  0.000000
3/31/2010	3:06:41 PM	SiCl4 MFC set to  0.000000
3/31/2010	3:06:41 PM	Bypass solenoid MFC set to  0.000000
3/31/2010	3:06:41 PM	Tube furnace set to 0
3/31/2010	3:06:41 PM	Helium valve closed
3/31/2010	3:06:41 PM	H2 valve closed
3/31/2010	3:06:41 PM	BCl3 valve closed
3/31/2010	3:06:41 PM	PH3 valve closed
3/31/2010	3:06:41 PM	SiCl4 pre valve closed
3/31/2010	3:06:41 PM	SiCl4 post valve closed
3/31/2010	3:06:41 PM	Bubbler valve closed
3/31/2010	3:06:41 PM	Main Vac valve opened
3/31/2010	3:06:41 PM	Bypass valve opened
3/31/2010	3:06:41 PM	Helium MFC set to  0.000000
3/31/2010	3:06:41 PM	H2 MFC set to  0.000000
3/31/2010	3:06:41 PM	BCl3 MFC set to  0.000000
3/31/2010	3:06:41 PM	SiCl4 MFC set to  0.000000
3/31/2010	3:06:41 PM	Bypass solenoid MFC set to  0.000000
3/31/2010	3:06:41 PM	Tube furnace set to 0
3/31/2010	3:06:42 PM	Run finished at 3:06 PM
3/31/2010	3:06:42 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/31/2010	3:10:23 PM	Recipe started at 3:10 PM
3/31/2010	3:10:23 PM	Helium valve closed
3/31/2010	3:10:23 PM	BCl3 valve closed
3/31/2010	3:10:23 PM	PH3 valve closed
3/31/2010	3:10:23 PM	SiCl4 pre valve closed
3/31/2010	3:10:23 PM	SiCl4 post valve closed
3/31/2010	3:10:23 PM	Main Vac valve closed
3/31/2010	3:10:23 PM	Bypass valve closed
3/31/2010	3:10:23 PM	Bubbler valve closed
3/31/2010	3:10:23 PM	H2 valve opened
3/31/2010	3:10:23 PM	Helium MFC set to  0.000000
3/31/2010	3:10:23 PM	H2 MFC set to  500.000000
3/31/2010	3:10:23 PM	BCl3 MFC set to  0.000000
3/31/2010	3:10:23 PM	SiCl4 MFC set to  0.000000
3/31/2010	3:10:23 PM	Bypass solenoid MFC set to  0.000000
3/31/2010	3:10:23 PM	Tube furnace set to 0
3/31/2010	3:11:44 PM	Helium valve closed
3/31/2010	3:11:45 PM	BCl3 valve closed
3/31/2010	3:11:45 PM	PH3 valve closed
3/31/2010	3:11:45 PM	SiCl4 pre valve closed
3/31/2010	3:11:45 PM	SiCl4 post valve closed
3/31/2010	3:11:45 PM	Main Vac valve closed
3/31/2010	3:11:45 PM	Bypass valve closed
3/31/2010	3:11:45 PM	H2 valve opened
3/31/2010	3:11:45 PM	Bubbler valve opened
3/31/2010	3:11:45 PM	Helium MFC set to  0.000000
3/31/2010	3:11:45 PM	H2 MFC set to  500.000000
3/31/2010	3:11:45 PM	BCl3 MFC set to  0.000000
3/31/2010	3:11:45 PM	SiCl4 MFC set to  0.000000
3/31/2010	3:11:45 PM	Bypass solenoid MFC set to  0.000000
3/31/2010	3:11:45 PM	Tube furnace set to 1000
3/31/2010	3:31:45 PM	Helium valve closed
3/31/2010	3:31:45 PM	PH3 valve closed
3/31/2010	3:31:45 PM	Main Vac valve closed
3/31/2010	3:31:45 PM	Bypass valve closed
3/31/2010	3:31:45 PM	H2 valve opened
3/31/2010	3:31:45 PM	BCl3 valve opened
3/31/2010	3:31:45 PM	SiCl4 pre valve opened
3/31/2010	3:31:45 PM	SiCl4 post valve opened
3/31/2010	3:31:45 PM	Bubbler valve opened
3/31/2010	3:31:45 PM	Helium MFC set to  0.000000
3/31/2010	3:31:45 PM	H2 MFC set to  500.000000
3/31/2010	3:31:45 PM	BCl3 MFC set to  35.000000
3/31/2010	3:31:45 PM	SiCl4 MFC set to  400.000000
3/31/2010	3:31:45 PM	Bypass solenoid MFC set to  0.000000
3/31/2010	3:31:45 PM	Tube furnace set to 1000
3/31/2010	3:51:45 PM	H2 valve closed
3/31/2010	3:51:45 PM	BCl3 valve closed
3/31/2010	3:51:45 PM	PH3 valve closed
3/31/2010	3:51:45 PM	SiCl4 pre valve closed
3/31/2010	3:51:45 PM	SiCl4 post valve closed
3/31/2010	3:51:45 PM	Main Vac valve closed
3/31/2010	3:51:45 PM	Bypass valve closed
3/31/2010	3:51:45 PM	Helium valve opened
3/31/2010	3:51:45 PM	Bubbler valve opened
3/31/2010	3:51:45 PM	Helium MFC set to  500.000000
3/31/2010	3:51:45 PM	H2 MFC set to  0.000000
3/31/2010	3:51:45 PM	BCl3 MFC set to  0.000000
3/31/2010	3:51:45 PM	SiCl4 MFC set to  0.000000
3/31/2010	3:51:45 PM	Bypass solenoid MFC set to  0.000000
3/31/2010	3:51:45 PM	Tube furnace set to 0
3/31/2010	4:11:45 PM	Helium valve closed
3/31/2010	4:11:45 PM	H2 valve closed
3/31/2010	4:11:45 PM	BCl3 valve closed
3/31/2010	4:11:45 PM	PH3 valve closed
3/31/2010	4:11:45 PM	SiCl4 pre valve closed
3/31/2010	4:11:45 PM	SiCl4 post valve closed
3/31/2010	4:11:45 PM	Main Vac valve closed
3/31/2010	4:11:45 PM	Bypass valve closed
3/31/2010	4:11:45 PM	Bubbler valve closed
3/31/2010	4:11:45 PM	Helium MFC set to  0.000000
3/31/2010	4:11:45 PM	H2 MFC set to  0.000000
3/31/2010	4:11:45 PM	BCl3 MFC set to  0.000000
3/31/2010	4:11:45 PM	SiCl4 MFC set to  0.000000
3/31/2010	4:11:45 PM	Bypass solenoid MFC set to  0.000000
3/31/2010	4:11:45 PM	Tube furnace set to 0
3/31/2010	4:11:45 PM	Run finished at 4:11 PM
3/31/2010	4:22:52 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/31/2010	4:22:52 PM	Recipe started at 4:22 PM
3/31/2010	4:22:52 PM	Helium valve closed
3/31/2010	4:22:52 PM	H2 valve closed
3/31/2010	4:22:52 PM	BCl3 valve closed
3/31/2010	4:22:52 PM	PH3 valve closed
3/31/2010	4:22:52 PM	SiCl4 pre valve closed
3/31/2010	4:22:52 PM	SiCl4 post valve closed
3/31/2010	4:22:52 PM	Main Vac valve closed
3/31/2010	4:22:52 PM	Bubbler valve closed
3/31/2010	4:22:52 PM	Bypass valve opened
3/31/2010	4:22:52 PM	Helium MFC set to  0.000000
3/31/2010	4:22:52 PM	H2 MFC set to  0.000000
3/31/2010	4:22:52 PM	BCl3 MFC set to  0.000000
3/31/2010	4:22:52 PM	SiCl4 MFC set to  0.000000
3/31/2010	4:22:52 PM	Bypass solenoid MFC set to  0.000000
3/31/2010	4:22:53 PM	Tube furnace set to 0
3/31/2010	4:23:23 PM	Helium valve closed
3/31/2010	4:23:23 PM	H2 valve closed
3/31/2010	4:23:23 PM	BCl3 valve closed
3/31/2010	4:23:23 PM	PH3 valve closed
3/31/2010	4:23:23 PM	SiCl4 pre valve closed
3/31/2010	4:23:23 PM	SiCl4 post valve closed
3/31/2010	4:23:23 PM	Bubbler valve closed
3/31/2010	4:23:23 PM	Main Vac valve opened
3/31/2010	4:23:23 PM	Bypass valve opened
3/31/2010	4:23:23 PM	Helium MFC set to  0.000000
3/31/2010	4:23:23 PM	H2 MFC set to  0.000000
3/31/2010	4:23:23 PM	BCl3 MFC set to  0.000000
3/31/2010	4:23:23 PM	SiCl4 MFC set to  0.000000
3/31/2010	4:23:23 PM	Bypass solenoid MFC set to  0.000000
3/31/2010	4:23:23 PM	Tube furnace set to 0
3/31/2010	4:23:24 PM	Run finished at 4:23 PM
3/31/2010	4:23:24 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
